Topics

Topic 1

1. Kinetic theory of gases
2. Physics of low pressures
3. Basic laws for ideal gas

Topic 2

1. Evaporation
2. Free path of molecules
3. Viscosity coefficient, mean free path, molecule diameter, relation
4. Thermal conductance of gases

Topic 3

1. Continuum Flow
2. Transitional Flow
3. Positive Displacement Vacuum Pumps
4. Kinetic Vacuum Pumps
5. Capture Vacuum Pumps

Topic 4

1. Turbomolecular pumps
2. Getter pumps
3. Ion sputter pumps
4. Cryopumps

Topic 5

1. Partial pressure measurements
2. Leak detection

Topic 6

1. Vacuum materials
2. Clean Rooms
3. Applications to technology and analysis